Controlled polarity of sputter-deposited aluminum nitride on metals observed by aberration corrected scanning transmission electron microscopy

Publication Information

Title

Japanese:
English:	Controlled polarity of sputter-deposited aluminum nitride on metals observed by aberration corrected scanning transmission electron microscopy

Author

Japanese:	春本高志, 三宮工, 松川洋平, 村石信二, 史蹟, 中村吉男, 沢田英敬, 田中崇之, 谷城康眞, 高柳邦夫.
English:	T. Harumoto, T. Sannomiya, Y. Matsukawa, S. Muraishi, Ji Shi, Y. Nakamura, H. Sawada, T. Tanaka, Y. Tanishiro, K. Takayanagi.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

Vol. 113 No. 8 p. 084306

Published date

Feb. 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI