Fabrication of SmCo films using facing targets sputtering system with sputtering Ar and Xe gas

Publication Information

Title

Japanese:
English:	Fabrication of SmCo films using facing targets sputtering system with sputtering Ar and Xe gas

Author

Japanese:	高村陽太, 酒井秀忠, 中川茂樹.
English:	Y. Takamura, H. Sakai, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

DD-01

Published date

May 13, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE International Magnetics Conference (Intermag)

Conference site

Japanese:	北京
English:	Beijing