In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process

Publication Information

Title

Japanese:
English:	In-situ internal stress observation of ferromagnetic thin films at the initial stage of the film growth during sputter-deposition process

Author

Japanese:	林原久憲, 中込将成, 高村陽太, 中川茂樹.
English:	H. Hayashibara, M. Nakagome, Y. Takamura, S. Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	2015 IEEE International Magnetics Conference (INTERMAG)

Volume, Number, Page

HC-11

Published date

May 15, 2015

Publisher

Japanese:
English:	IEEE

Conference name

Japanese:
English:	IEEE International Magnetics Conference (Intermag)

Conference site

Japanese:	北京
English:	Beijing

DOI