A 0.1G-to-20G Integrated MEMS Inertial Sensor

Publication Information

Title

Japanese:
English:	A 0.1G-to-20G Integrated MEMS Inertial Sensor

Author

Japanese:	山根大輔, 小西敏文, 松島隆明, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Volume 54 Number 8 pp. 087202.1-087202.4

Published date

July 7, 2015

Publisher

Japanese:
English:	The Japan Society of Applied Physics

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI