A Sub-1G CMOS-MEMS Accelerometer

Publication Information

Title

Japanese:
English:	A Sub-1G CMOS-MEMS Accelerometer

Author

Japanese:	山根大輔, 小西敏文, 高安基大, 伊藤浩之, 道正志郎, 石原昇, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 513-516

Published date

Nov. 1, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Sensors 2015

Conference site

Japanese:
English:	Busan