A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 寺西美波, TSO-FU MARK CHANG, 陳君怡, 年吉洋, 益一哉, 曽根正人, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Hiroshi Toshiyoshi, Kazuya Masu, Masato Sone, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 16, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	25th Advanced Metallization Conference Asian Session (ADMETAplus2015)

Conference site

Japanese:
English:	Seoul