MEMS加速度センサのための金属構造体の密着力評価

Publication Information

Title

Japanese:	MEMS加速度センサのための金属構造体の密着力評価
English:

Author

Japanese:	佐布晃昭, 小西敏文, 松島隆明, 山根大輔, 年吉洋, 曽根正人, 益一哉, 町田克之.
English:	Teruaki Safu, Toshifumi Konishi, Takaaki Matsushima, Daisuke Yamane, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 29pm3-PM-5

Published date

Oct. 28, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第7回集積化MEMSシンポジウム
English:

Conference site

Japanese:	新潟県
English: