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Title
Japanese:Sub-1G?20G集積化MEMS加速度センサの基本評価 
English: 
Author
Japanese: 山根大輔, 小西敏文, 年吉 洋, 益 一哉, 町田克之.  
English: Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 15a-PB4-3
Published date Sept. 13, 2015 
Publisher
Japanese: 
English: 
Conference name
Japanese:第76回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:愛知県名古屋市 
English: 

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