Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology

Publication Information

Title

Japanese:
English:	Robustness of Integrated Stoppers for MEMS Accelerometer Fabricated by Multi-layered Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 高安基大, 佐布晃昭, 年吉洋, 曽根正人, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Motohiro Takayasu, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	SSDM2015, 2015 International Conference on Solod State Devices and Materials

Volume, Number, Page

pp. 786-787

Published date

Sept. 27, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM2015, 2015 International Conference on Solod State Devices and Materials

Conference site

Japanese:
English:	Hokkaido