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Title
Japanese:
English:
Effective two-dimensional pattern generation for self-aligned double patterning
Author
Japanese:
井原 岳志
,
高橋 篤司
, Chikaaki Kodama.
English:
Takeshi Ihara
,
Atsushi Takahashi
, Chikaaki Kodama.
Language
English
Journal/Book name
Japanese:
English:
Proc. IEEE International Symposium on Circuits and Systems (ISCAS 2015)
Volume, Number, Page
pp. 2141-2144
Published date
May 2015
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
Lisbon
DOI
https://doi.org/10.1109/ISCAS.2015.7169103
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