Effective two-dimensional pattern generation for self-aligned double patterning

Publication Information

Title

Japanese:
English:	Effective two-dimensional pattern generation for self-aligned double patterning

Author

Japanese:	井原岳志, 高橋篤司, Chikaaki Kodama.
English:	Takeshi Ihara, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. IEEE International Symposium on Circuits and Systems (ISCAS 2015)

Volume, Number, Page

pp. 2141-2144

Published date

May 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Lisbon

DOI