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Title
Japanese: 
English:Perpendicular coercivity enhancement of CoPt/TiN films by nitrogen incorporation during deposition 
Author
Japanese: 安 紅雨, Jian Wang, Janos Szivos, 春本 高志, 三宮 工, 村石 信二, Gyorgy Safran, 中村 吉男, 史 蹟.  
English: Hongyu An, Jian Wang, Janos Szivos, Takashi Harumoto, Takumi Sannomiya, Shinji Muraishi, Gyorgy Safran, Yoshio Nakamura, Ji Shi.  
Language English 
Journal/Book name
Japanese: 
English:J. Appl. Phys. 
Volume, Number, Page Vol. 118        p. 203907
Published date Nov. 25, 2015 
Publisher
Japanese: 
English:AIP Publishing LLC 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL http://dx.doi.org/10.1063/1.4936365
 
DOI https://doi.org/10.1063/1.4936365
Abstract The effect of N incorporation on the structure and magnetic properties of CoPt thin filmsdeposited on glass substrates with TiN seed layers has been investigated. During the deposition of CoPt, introducing 20% N2 into Ar atmosphere promotes the (001) texture and enhances the perpendicular coercivity of CoPt film compared with the filmdeposited in pure Ar and post-annealed under the same conditions. From the in situx-ray diffraction results, it is confirmed that N incorporation expands the lattice parameter of CoPt, which favors the epitaxialgrowth of CoPt on TiN. During the post-annealing process, N releases from CoPt film and promotes the L10 ordering transformation of CoPt.

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