Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers

Publication Information

Title

Japanese:
English:	Structure Stability of High Aspect Ratio Ti/Au Two-Layer Cantilevers for Applications in MEMS Accelerometers

Author

Japanese:	寺西美波, TSO-FU MARK CHANG, 陳君怡, 小西敏文, 町田克之, 山根大輔, 益一哉, 曽根正人, 曽根正人.
English:	Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Microelectronics Engineering

Volume, Number, Page

Vol. 153 pp. 90-93

Published date

Apr. 1, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI