A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology

Publication Information

Title

Japanese:
English:	A MEMS Inertia Sensor with Brownian Noise of Below 50 nG/Hz^1/2 by Multi-Layer Metal Technology

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 148-149

Published date

Feb. 23, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Inertial Sensors 2016

Conference site

Japanese:
English:	Laguna Beach, California

Official URL