Inverse analysis of accelerator distribution in copper through silicon via filling

Publication Information

Title

Japanese:
English:	Inverse analysis of accelerator distribution in copper through silicon via filling

Author

Japanese:	Tatsuro Matsuoka, Keiichi Otsubo, 大西有希, 天谷賢治, 早瀬仁則.
English:	Tatsuro Matsuoka, Keiichi Otsubo, Yuki Onishi, Kenji Amaya, Masanori Hayase.

Language

English

Journal/Book name

Japanese:
English:	Electrochimica Acta

Volume, Number, Page

Vol. 82 No. 1 pp. 365-362

Published date

Nov. 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI