Growth of epitaxial orthorhombic YO1.5-substituted HfO2 thin film

Publication Information

Title

Japanese:
English:	Growth of epitaxial orthorhombic YO1.5-substituted HfO2 thin film

Author

Japanese:	清水荘雄, Kiliha Katayama, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 舟窪浩.
English:	Takao Shimizu, Kiliha Katayama, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Lett.

Volume, Number, Page

Vol. 107 pp. 032910-1-5

Published date

July 24, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI