A Fast Manufacturability Aware Optical Proximity Correction (OPC) Algorithm with Adaptive Wafer Image Estimation

Publication Information

Title

Japanese:
English:	A Fast Manufacturability Aware Optical Proximity Correction (OPC) Algorithm with Adaptive Wafer Image Estimation

Author

Japanese:	AWAD Ahmed, 高橋篤司, Chikaaki Kodama.
English:	Ahmed Awad, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. Design, Automation and Test in Europe (DATE 2016)

Volume, Number, Page

pp. 49-54

Published date

Mar. 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI