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Title
Japanese: 
English:Crystalline/Amorphous Si Integrated Optical Couplers for 2D/3D Interconnection 
Author
Japanese: 伊東 憲人, 久能 雄輝, 林侑介, 鈴木 純一, 北條 直也, 雨宮 智宏, 西山 伸彦, 荒井 滋久.  
English: Kazuto Itou, Yuki Kuno, Yuusuke Hayashi, Junichi Suzuki, Naoya Hojo, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.  
Language English 
Journal/Book name
Japanese: 
English:IEEE Journal of Selected Topics in Quantum Electronics 
Volume, Number, Page Vol. 22    No. 6    pp. 4403209
Published date Oct. 20, 2016 
Publisher
Japanese: 
English: 
Conference name
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Conference site
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File
DOI http://dx.doi.org/10.1109/JSTQE.2016.2566263
Abstract The in-plane and interlayer waveguide-type couplers between crystalline Si and amorphous-Si:H wire waveguides, for 2D/3D hybrid-material integration are presented in this paper. The in-plane–type coupler achieves stable coupling between two waveguides by using tapers located at the tips of the waveguides. The interlayer-type coupler can connect two waveguides, despite an interlayer distance of 1 μm, with a simple process flow, by introducing a trident structure. An experiment was conducted in which the in-plane and interlayer-type couplers realized low coupling losses (coupling efficiencies) of 0.16 dB (96%) and 0.49 dB (89%) per coupler, respectively.

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