A 1-mG MEMS Sensor

Publication Information

Title

Japanese:
English:	A 1-mG MEMS Sensor

Author

Japanese:	山根大輔, 小西敏文, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	ECS Transactions

Volume, Number, Page

vol. 72 no. 3 pp. 7-14

Published date

May 29, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI