Optimization of a-Si (i) Passivation Layer Fabricated by Facing Target Sputtering (FTS) Method

Publication Information

Title

Japanese:	Optimization of a-Si (i) Passivation Layer Fabricated by Facing Target Sputtering (FTS) Method
English:

Author

Japanese:	Akira Faris, Kazuyoshi Nakada, Shinsuke Miyajima.
English:	Bin Mohd Zulkifly Faris Akira, Kazuyoshi Nakada, Shinsuke Miyajima.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

15p-P13-10

Published date

Sept. 13, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第77回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	新潟県新潟市
English: