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Title
Japanese:積層メタル差動型MEMS加速度センサの基礎検討 
English: 
Author
Japanese: 山根大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 道正 志郎, 石原 昇, 曽根 正人, 年吉 洋, 益 一哉, 町田 克之.  
English: Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 14p-P5-3
Published date Sept. 13, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese:第77回応用物理学会秋季学術講演会 
English: 
Conference site
Japanese:新潟県 
English: 
Official URL https://www.jsap.or.jp/activities/annualmeetings/
 

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