High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications

Publication Information

Title

Japanese:
English:	High Mechanical Strength in Gold Films Electroplated with Supercritical Carbon Dioxide for MEMS Applications

Author

Japanese:	TangHao-Chun, 陳君怡, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 15a-B10-13

Published date

Sept. 13, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第77回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	新潟県
English:

Official URL