Effect of Stress on Ferroelectricity of (Hf0.5Zr0.5)O2 Thin Films

Publication Information

Title

Japanese:
English:	Effect of Stress on Ferroelectricity of (Hf0.5Zr0.5)O2 Thin Films

Author

Japanese:	舟窪浩, 白石貴久, 清水荘雄, 横内達彦, T.Oikawa, 内田寛.
English:	H.Funakubo, T.Shiraishi, T.Shimizu, T.Yokouchi, T.Oikawa, H.Uchida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 27, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	SSDM 2015

Conference site

Japanese:
English:	Sapporo