Reactive Sputtering Process and Properties of Ba(ZrxTi1-x)O3 Films for High Frequency Applications

Publication Information

Title

Japanese:
English:	Reactive Sputtering Process and Properties of Ba(ZrxTi1-x)O3 Films for High Frequency Applications

Author

Japanese:	Jinwoong KIM, Hiromi SHIMA, T. YAMAMOTO, 安井伸太郎, 舟窪浩, Tomoaki YAMADA, 西田謙.
English:	Jinwoong KIM, Hiromi SHIMA, T. YAMAMOTO, Shintaro YASUI, Hiroshi FUNAKUBO, Tomoaki YAMADA, Ken NISHIDA.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 24, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISAF-ISIF-PFM 2015

Conference site

Japanese:
English: