種々の基板上に作製した (Hf0.5Zr 0.5)O2薄膜の特性

Publication Information

Title

Japanese:	種々の基板上に作製した (Hf0.5Zr 0.5)O2薄膜の特性
English:

Author

Japanese:	白石貴久, 片山きりは, 横内達彦, 清水荘雄, 及川貴弘, 内田寛, 舟窪浩, 木口賢紀, 今野豊彦.
English:	Takahisa Shiraishi, Kiriha Katayama, Tatsuhiko Yokouchi, Takao Shimizu, 及川貴弘, Hiroshi Uchida, HIROSHI FUNAKUBO, Takanori Kiguchi, Toyohiko Konno.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 22, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第35回エレクトロセラミックス研究討論会
English:

Conference site

Japanese:	東京都
English: