Evaluation results of a compact and highly-sensitive inertial sensor module are presented. The module is consisting of an original MEMS accelerometer and a capacitive-to-digital conversion IC commercially available. The MEMS device is fabricated by using a gold-metal multi-layer process technology that can achieve sensitive acceleration measurement. The IC is selected considering the resolution suitable for the MEMS device. The fabricated module was evaluated and thus the sensitivity of 102 fF/G was achieved.