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Title
Japanese:積層メタル技術によるMEMS加速度センサを用いた慣性センサモジュールの検討 
English:A Study of Inertial Sensor Module with MEMS Accelerometers by Multi-layer Metal Technology 
Author
Japanese: 權田 惇晟, 高安 基大, 山根 大輔, 小西 敏文, 伊藤 浩之, 道正 志郎, 石原 昇, 町田 克之, 益 一哉.  
English: Toshiaki Gonda, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         p. 25pm4-PM-006
Published date Oct. 25, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese:集積化MEMSシンポジウム 
English: 
Conference site
Japanese:長崎県 
English: 
Official URL http://www.sensorsymposium.org/index_j.html
 
Abstract Evaluation results of a compact and highly-sensitive inertial sensor module are presented. The module is consisting of an original MEMS accelerometer and a capacitive-to-digital conversion IC commercially available. The MEMS device is fabricated by using a gold-metal multi-layer process technology that can achieve sensitive acceleration measurement. The IC is selected considering the resolution suitable for the MEMS device. The fabricated module was evaluated and thus the sensitivity of 102 fF/G was achieved.

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