差動型積層メタルMEMS加速度センサの検討

Publication Information

Title

Japanese:	差動型積層メタルMEMS加速度センサの検討
English:

Author

Japanese:	山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 曽根正人, 年吉洋, 益一哉, 町田克之.
English:	Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

p. 25am2-PM-003

Published date

Oct. 24, 2016

Publisher

Japanese:
English:

Conference name

Japanese:	第8回集積化MEMSシンポジウム
English:

Conference site

Japanese:	長崎県
English:

Official URL