A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology

Publication Information

Title

Japanese:
English:	A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology

Author

Japanese:	小西敏文, 山根大輔, 佐布晃昭, 曽根正人, 年吉洋, 益一哉, 町田克之.
English:	Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:	IEEE Proceeding

Volume, Number, Page

pp. 1162-1164

Published date

Oct. 30, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Sensors 2016

Conference site

Japanese:
English:	FL

Official URL

Award

Best Industrial Paper Award