A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model

Publication Information

Title

Japanese:
English:	A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model

Author

Japanese:	AWAD Ahmed, 高橋篤司, 児玉親亮.
English:	Ahmed Awad, Atsushi Takahashi, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	IEICE Trans. Fundamentals

Volume, Number, Page

Vol. E99-A No. 12 pp. 2363-2374

Published date

Dec. 1, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI