Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement

Publication Information

Title

Japanese:
English:	Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement

Author

Japanese:	AWAD Ahmed, 高橋篤司, 田中聡, 田中聡.
English:	Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	IPSJ Trans. on System LSI Design Methodology

Volume, Number, Page

Vol. 10 pp. 28-38

Published date

Feb. 3, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

Official URL

DOI