A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel Intensity Modeling

Publication Information

Title

Japanese:
English:	A Fast Process-Variation-Aware Mask Optimization Algorithm With a Novel Intensity Modeling

Author

Japanese:	AWAD Ahmed, 高橋篤司, Satoshi Tanaka, Chikaaki Kodama.
English:	Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	IEEE Transactions on Very Large Scale Integration (VLSI) Systems

Volume, Number, Page

Vol. 25 No. 3 pp. 998-1011

Published date

Mar. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI