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Publication Information
Title
Japanese:
微細毛構造を持つ双極型静電チャックの吸着部平滑化による把持性能向上
English:
Author
Japanese:
河野 健人
,
Hemthavy Pasomphone
,
高橋 邦夫
,
齋藤滋規
.
English:
Kento Kawano
,
PASOMPHONE HEMTHAVY
,
KUNIO TAKAHASHI
,
Shigeki SAITO
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 1, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
2017年度精密工学会春季大会
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.