FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices

Publication Information

Title

Japanese:
English:	FEM Simulation on Structure Stability of Ti/Au Multi-Layered Cantilevers with Various Dimensions for Applications as Movable Structures in MEMS Devices

Author

Japanese:	寺西美波, Chang Tso-Fu Mark, 陳君怡, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Minami Teranishi, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 18, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	21th International Conference on Solid State Ionics

Conference site

Japanese:
English:	Padua