Low Temperature MOCVD of Ta2O5 with good dielectric property from Ta(NtBu)(OtBu)3 and O2

Publication Information

Title

Japanese:
English:	Low Temperature MOCVD of Ta2O5 with good dielectric property from Ta(NtBu)(OtBu)3 and O2

Author

Japanese:	千葉洋一, Ken-ichi TADA, Taishi FURUKAWA, Toshiki YAMAMOTO, Tadahiro YOTSUYA, Noriaki OSHIMA, 舟窪浩.
English:	Hirokazu CHIBA, Ken-ichi TADA, Taishi FURUKAWA, Toshiki YAMAMOTO, Tadahiro YOTSUYA, Noriaki OSHIMA, Hiroshi FUNAKUBO.

Language

English

Journal/Book name

Japanese:
English:	J. Ceram. Soc. Jpn.

Volume, Number, Page

vol. 124 no. 5 pp. 510-514

Published date

May 1, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI