Durability of surface acoustic wave motor for high speed and precision positioning

Publication Information

Title

Japanese:
English:	Durability of surface acoustic wave motor for high speed and precision positioning

Author

Japanese:	Y. Chiba, H. Usuba, K. Adachi, 黒澤実.
English:	Y. Chiba, H. Usuba, K. Adachi, M. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Proc. 17th Int. Conf, on Wear on Materials

Volume, Number, Page

Published date

Apr. 19, 2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:	17th Int. Conf, on Wear on Materials,

Conference site

Japanese:
English:	Las. Vegas