Effects of substrate surface composition and deposition temperature on deposition of flat and continuous Ru thin films

Publication Information

Title

Japanese:
English:	Effects of substrate surface composition and deposition temperature on deposition of flat and continuous Ru thin films

Author

Japanese:	千葉洋一, Masaki HIRANO, 河野和久, Noriaki OSHIMA, 舟窪浩.
English:	Hirokazu CHIBA, Masaki HIRANO, Kazuhisa KAWANO, Noriaki OSHIMA, Hiroshi FUNAKUBO.

Language

English

Journal/Book name

Japanese:
English:	Journal of the Ceramic Society of Japan

Volume, Number, Page

vol. 124 no. 6

Published date

June 1, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI