Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing

Publication Information

Title

Japanese:
English:	Formation of (111) orientation-controlled ferroelectric orthorhombic HfO2 thin films from solid phase via annealing

Author

Japanese:	三村和仙, Kiliha Katayama, 清水荘雄, 内田寛, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Kiliha Katayama, Takao Shimizu, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Lett.

Volume, Number, Page

vol. 109 pp. 052903-1-4

Published date

Aug. 4, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI