Growth of (111)-oriented epitaxial and textured ferroelectric Y-doped HfO2 films for downscaled devices

Publication Information

Title

Japanese:
English:	Growth of (111)-oriented epitaxial and textured ferroelectric Y-doped HfO2 films for downscaled devices

Author

Japanese:	Kiliha Katayama, 清水荘雄, 坂田修身, Takahisa Shiraishi, Syogo Nakamura, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 内田寛, 舟窪浩.
English:	Kiliha Katayama, Takao Shimizu, Osami Sakata, Takahisa Shiraishi, Syogo Nakamura, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Hiroshi Uchida, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Lett.

Volume, Number, Page

vol. 109 pp. 112901-1-5

Published date

Sept. 12, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI