Piezoelectric Materials for MEMS Application | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Piezoelectric Materials for MEMS Application

Author

Japanese:	舟窪浩.
English:	HIROSHI FUNAKUBO.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 11, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MEMS Engineer Forum

Conference site

Japanese:
English:	Ryogoku

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