Orientation Controlled HfO2-Based Ferroelectric Films Prepared by Solid Phase Local Epitaxial Technique for High Density Memory Applications

Publication Information

Title

Japanese:
English:	Orientation Controlled HfO2-Based Ferroelectric Films Prepared by Solid Phase Local Epitaxial Technique for High Density Memory Applications

Author

Japanese:	舟窪浩, 三村和仙, 清水荘雄, Kiliha Katayama, 内田寛, 木口賢紀, Akihiro Akama, Toyohiko Konno, 坂田修身.
English:	Hiroshi Funakubo, Takanori Mimura, Takao Shimizu, Kiliha Katayama, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko Konno, Osami Sakata.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 27, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2016 MRS Fall Meeting & Exhibit

Conference site

Japanese:
English:	Boston