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Title
Japanese:配向制御したHfO2基強誘電体薄膜の作製と特性評価 
English: 
Author
Japanese: 舟窪 浩, 清水荘雄, 片山きりは, 三村和仙.  
English: HIROSHI FUNAKUBO, Takao Shimizu, 片山きりは, Takanori Mimura.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date June 29, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese:応用物理学会シリコンテクノロジー分科会 第192回研究集会 
English: 
Conference site
Japanese:東京都 
English: 

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