Impact of Incubation Time on Deposition of Flat Ru Thin Film on Various Kinds of Substrates at Different Temperature

Publication Information

Title

Japanese:
English:	Impact of Incubation Time on Deposition of Flat Ru Thin Film on Various Kinds of Substrates at Different Temperature

Author

Japanese:	千葉洋一, Masaki Hirano, Kazuhisa Kawano, Noriaki Oshima, 舟窪浩.
English:	Hirokazu Chiba, Masaki Hirano, Kazuhisa Kawano, Noriaki Oshima, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 7, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISCSI-Ⅶ/ISTDM 2016

Conference site

Japanese:
English:	Nagoya