Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors

Publication Information

Title

Japanese:
English:	Fabrication and Characterization of High Strength Electrodeposited Gold toward High-Sensitive MEMS Inertial Sensors

Author

Japanese:	Chang Tso-Fu Mark, 陳君怡, Tang Hao-Chun, 葭葉将治, 名越貴志, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Advances in Microelectronics Reviews

Volume, Number, Page

Vol. 1 pp. 93-106

Published date

Dec. 1, 2017

Publisher

Japanese:
English:	IFSA Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English: