A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices

Publication Information

Title

Japanese:
English:	A Study on Young’s Modulus of Electroplated Gold Cantilevers for MEMS Devices

Author

Japanese:	中島英亮, Chang Tso-Fu Mark, 陳君怡, 小西敏文, 町田克之, 山根大輔, 益一哉, 曽根正人, 曽根正人.
English:	Hideaki Nakajima, Tso-Fu Mark Chang, Chun-Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Volume, Number, Page

pp. 264 - 267

Published date

Aug. 15, 2017

Publisher

Japanese:
English:	IEEE Conference Publications

Conference name

Japanese:
English:

Conference site

Japanese:
English: