(C-1-06) Characterization of Amorphous Silicon Passivation Layer Deposited by Facing Target Sputtering Using Temperature-Dependent Minority Carrier Lifetime Measurement

Publication Information

Title

Japanese:
English:	(C-1-06) Characterization of Amorphous Silicon Passivation Layer Deposited by Facing Target Sputtering Using Temperature-Dependent Minority Carrier Lifetime Measurement

Author

Japanese:	白取優大, 中田和吉, 宮島晋介.
English:	Yuta Shiratori, Kazuyoshi Nakada, Shinsuke Miyajima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 20, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 International Conference on Solid State Devices and Materials

Conference site

Japanese:
English:	Sendai