Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology

Publication Information

Title

Japanese:
English:	Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology

Author

Japanese:	辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉.
English:	Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 International Conference on Solid State Devices and Materials (SSDM 2017)

Conference site

Japanese:	宮城県
English:	Miyagi

Official URL