A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes

Publication Information

Title

Japanese:
English:	A Tri-axis MEMS Accelerometer With a Gold Electroplated Single-proof-mass and Segmented Electrodes

Author

Japanese:	乙部翔太, 山根大輔, 小西敏文, 佐布晃昭, 伊藤浩之, 道正志郎, 石原昇, 町田克之, 益一哉.
English:	Shouta Otobe, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 International Conference on Solid State Devices and Materials (SSDM 2017)

Conference site

Japanese:	宮城県
English:	Miyagi

Official URL