Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討
English:
A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer
Author
Japanese:
乙部 翔太
,
高安 基大
,
山根 大輔
,
小西 敏文
,
佐布 晃昭
,
伊藤 浩之
,
道正 志郎
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Shouta Otobe
,
Motohiro Takayasu
,
Daisuke Yamane
,
Toshifumi Konishi
,
Teruaki Safu
,
Hiroyuki Ito
,
Shiro Dosho
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Oct. 31, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
第34回「センサ・マイクロマシンと応用システム」シンポジウム
English:
The 34th SENSOR SYMPOSIUM
Conference site
Japanese:
広島県
English:
Official URL
http://www.sensorsymposium.org/index_j.html
©2007
Tokyo Institute of Technology All rights reserved.