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Title
Japanese:3軸MEMS加速度センサにおける単一Au錘および電極分割方式の検討 
English:A Study of a Single Au Proof Mass and Segmented Electrodes for Tri-axis MEMS Accelerometer 
Author
Japanese: 乙部 翔太, 高安 基大, 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 道正 志郎, 石原 昇, 町田 克之, 益 一哉.  
English: Shouta Otobe, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Oct. 31, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese:第34回「センサ・マイクロマシンと応用システム」シンポジウム 
English:The 34th SENSOR SYMPOSIUM 
Conference site
Japanese:広島県 
English: 
Official URL http://www.sensorsymposium.org/index_j.html
 

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