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Title
Japanese:積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討 
English:Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology 
Author
Japanese: 古賀 達也, 辻 一平, 高安 基大, 伊藤 浩之, 山根 大輔, 道正 志郎, 小西 敏文, 石原 昇, 町田 克之, 益 一哉.  
English: Tatsuya Koga, Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Oct. 31, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese:第9回 集積化MEMSシンポジウム 
English:The 9th Symposium on Integrated MEMS Technology 
Conference site
Japanese:広島県 
English: 
Official URL http://annex.jsap.or.jp/MEMS/
 

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