積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討

Publication Information

Title

Japanese:	積層メタル技術を用いたMEMS加速度センサの傾斜計応用の検討
English:

Author

Japanese:	辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉.
English:	Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

01pm1-A-6

Published date

Oct. 31, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第9回集積化MEMSシンポジウム
English:

Conference site

Japanese:	広島県
English:

Official URL