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Title
Japanese:積層メタルMEMS慣性センサの長期振動特性評価 
English: 
Author
Japanese: 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Tso-Fu Mark Chang, 曽根 正人, 町田 克之, 益 一哉.  
English: Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Oct. 31, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese:第9回集積化MEMSシンポジウム 
English: 
Conference site
Japanese:広島県 
English: 
Official URL http://annex.jsap.or.jp/MEMS/
 

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